Density Melting point Crystalline size
Bolck ≤ ≤
small（um )
Thin film Large(mm)
14
2. Thin film vs. block material-1
Density Melting point Crystalline size
➢ Stoichiometric ratio
– Non-stoichiometry is common in thin film
• SiO2
SiOx
• Transparent conductive film
– Tin indium oxide (InSnyOx) condConductivecond
Thin film: thickness less than 1 micrometer
Coating: thickness lagrer than1 micrometer
12
Difference between thin film and block material
13
Thin film vs. block material
thin film for semiconductive dives and integrated circuit（集成电路）
• Al、 polysilicon、SiO2
small（um )
Large(mm)
20
2. Thin film vs. block material-1
Density Melting point Crystalline size
Bolck
Thin film
ρb≤ρtf（有问题）
Mb≤Mtf
small（um )
Large(mm)
21
2. Thin film vs. block material -2
24
25
Gold-decorated Technology 鎏 金
• The process of “liujing”
– Making AuHg alloy (煞金) – Brushing Au compound (抹金) – Evaprating Hg (开金) – Making Au denser（密集的） (压光)
2
What is the “thin film”
3
4
5
6
7
8
9
10
11
What is the thin film？
a very thin layer of a substance on a supporting material; especially : a coating (as of a semiconductor) that is deposited in a layer one atom or one molecule thick
Technology of Thin Film:
Introduction
Outline
1. Concept of thin film 2. Difference between thin film and block material 3. History of thin film and coatingd 4. Modern technology for thin film deposition 5. The content of this course
small（um )
Large(mm)
18
Melting point (℃)
Thickness (Ᾱ)
19
2. Thin film vs. block material
Density Melting point Crystalline size
Bolck
Thin film
ρb≤ρtf（有问题）
Mb≤Mtf
29
Application in Modern Time
Electronic thin film Optical thin film Magnetic thin film Mechanical functional thin film
30
• Electronic thin film
– Conductive thin film and dielectric（介电）
26
Bronze（青铜） Mirror Polishing
27
Bronze Mirror Polishing
• There is Sn rich transparent layer with several hundred nanometer thickness on the surface of mirror.
• Dense SnO2 films with
microcrystallines
are
ห้องสมุดไป่ตู้
detected on the top of the Sn
Bronze mirror from easten han dynasty rich layer.
28
Glazing 上 釉
Glazing for ceramic • beautiful • clean
Bolck ≤ ≤
small（um )
Thin film Large(mm)
15
Density g/cm3
Temprature of substrate
16
Thin film vs. block material
Density Melting point Crystalline size
Bolck
Thin film
ρb≤ρtf（有问题）
Mb≤Mtf
small（um )
Large(mm)
17
2. Thin film vs. block material-1
Density Melting point Crystalline size
Bolck
Thin film
ρb≤ρtf（有问题）
Mb≤Mtf
Conductivity
22
Comparing to bulk materials, thin film materials have some unique properties
23
3. The History of Thin Film or Coating
Application in ancient time Application in morden time