Lump (Illumination Source)
Electron Source
Condenser Lens
Objective Lens
Sample
Projection Lens
Condenser Lens
Sample
Scanning Objective
Lens Sample
Screen Image
Theory of Scanning Electron Microscope
High Voltage
Camera
Electron Gun
Anode Condenser
Lens Deflection
Coils
Objective Lens
Specimen Chamber
Filament Wehnelt
R esolu tion
F ocus D epth (X 500)
x-rays A n alysis
5 ~ 0 .1 μ m S h allow (2~3 μ m )
N ot p ossib le
0 .5 ~ 0 .1 n m D eep (500μ m )
P ossib le
C olor
C olor
Theory of Scanning Electron Microscope
Al Coating Layer
Primary Electron Beam
Phosphors
Scintillator
Secondary Electron
Photomultiplier Photo Multiplier Tube
Theory of Scanning Electron Microscope
Lettuce Field(16M DRAM)
Hitachi High-Technologies Corporation Nano Technologies Sales Dept.
Theory of Scanning Electron Microscope
Cathodeluminescence
↓
↓
Secondary Electron
Secondary Electron Detector
~10nm (Excitation Volume for Secondary Electron Emission)
Specimen Current
Specimen
Photons Light Guide
+10kV
Signal
CRT
Secondary electron detection system
Theory of Scanning Electron Microscope
Electron Gun
SE Detector Specimen Chamber
Type
C h aracteristic
V oltage Illu m in ation
Source O b servation
OM ―
L igh t In A ir
TEM H igh V oltage
25~300kV E lectron
In V acuum
L ens
G lass
P ole P iece
Backscattered Electron
－
Secondary Electron
－
－
－
Vaccum Sample(Metal)
Simons,et.al
Theory of Scanning Electron Microscope
Secondary Electrons
Backscattered Electrons
Quantity of Electrons
1
100
10,000
Energy of Electron (eV)
(Incident beam energy : 10,000eV)
Energy spectrum of the electrons emitted from a specimen
Theory of Scanning Electron Microscope
Fluorescent screen
Image
Image
OM
TEM
SEM
Difference among OM, TEM and SEM
Deflection Coils
SE Detector
CRT
Theory of Scanning Electron Microscope
Characteristic X-Ray Backscattered Electron
B lack an d W h ite
M agn ification
~× 1K
~× 1000K
Objective Movable Aperture CRT
Specimen Stage
Model S-3000N Configuration of a scanning electron microscope
Theory of Scanning Electron Microscope
S o f t w ･ aP r e e r f o r m a n c e H a r d w a r e
Scanning Electron Beam of CRT
Scanning Electron Probe
L
Scanning(Y)
Scanning (X) l
Pixel
Specimen Magnification :( M)=L / l
CRT
Magnifying mechanism in the SEM
Mag. Control
Deflection Amplifier Scanning Electron Beam
CRT
Deflection Coils
Image Signal
SE Detector Specimen
Amplifier
Vacuum Pump
Configuration of a scanning electron microscope
Electron Beam Induced Current
Transmitted Electron Transmitted (Scattered) Electron
The primary electron beam-specimen interaction in the SEM
Theory of Scanning Electron Microscope