键合人员工艺参数培训――基础篇(软件版本9-28-2-32b)一、键合过程控制参数1.1、1st Bond和2nd bond参数1.2、Loop 参数1.3、Ball 参数1.4、Bits 参数二、走带控制参数2.1、W/H参数2.2、ELEV参数图一一、键合过程参数1.1.1 First Bond ParametersParameterDefault / Allowable Range FunctionTip 1DieTIP1123Default = 5 milsMin = 0 milMax = 25 mils劈刀从高速运行到芯片表面一段高度后会由高速变为低速,TIP 就是这个高度。
TIP OFFSET/TIP HEIGHTCV 1Die5DieTIP14CV 1Default = 0.5 mils/msMin = 0.2 mils/msMax = 3.0 mils/ms- 在TIP 范围内的速度。
-Parameter Default /Allowable RangeFunction USG Mode 1DiegUSGOutputDefault = C. CurrentMin = C. PowerMax = C. Voltage-超声模式- C.P:调整功率constant power改变超声- C.C: 调整功率constant current改变超声(最佳)- C.V: 调整功率constant voltage改变超声-USG Power 1 Default = 400 mWMin = 0 mWMax = 4000 mWUSG Volts 1 Default = 3500 mVMin = 0 mVMax = 16000 mVUSG Current 1 Default = 80 mAMin = 0 mAMax = 250 mA通过调整电流值改变超声大小,建议使用。
ParameterDefault / Allowable Range FunctionUSG Bond Time 1Die6gUSGForceDefault = 7 msMin = 0 msMax = 3980 ms1ST 压焊时间Force 1DiegBond Force1Default = 35 gramsMin = 0 gramsMax = 350 grams1ST 的压力Parameter Default /Allowable RangeFunctionUSG Pre-Delay 1 Default = 0 msMin = 0 msMax = 10 ms 压力开始到超声开始的延时时间,主要针对压得不十分理想的。
Lift USG RatioDiegLift USGDefault = 0 %Min = 0 %Max = 100 %劈刀离开金球时的超声,这是一个比例值,有助于金球焊接的稳定和牢固。
本功能主要对fine pitch类20%-40%ParameterDefault / Allowable Range FunctionUSG Pre-Bleed RatioDieTIP1CV 1USG Pre-BleedingDefault = 0 %Min = 0 %Max = 100 %超声波前置输出比例,此超声在TIP 高度范围内起作用Equalization Factor Default = 100 %Min = 0 %Max = 200 %USG Profile 1Default = RampMin = RampMax = Burst超声输出模式共有三种1、 梯形波形Ramp up/down2、 方波Square3、 凸形BurstParameterDefault / Allowable Range FunctionRamp Up Time 1USG Bond TimeRamp Down TimeRamp DownTimeDefault = 10 %Min = 0 %Max = 75 %Ramp Down Time 1Default = 0 % Min = 0 %Max = 25 %Burst Time 1USG Bond TimeBurst LevelBurstTime USG CurrentDefault = 1.5 msMin = 1.5 msMax = 3.0 msBurst Level 1 Default = 125 %Min = 100 %Max = 200 %CONTACT DETECT MODE 设定劈刀检测接触表面的方式VMode 是以Z轴的下降速度来检测的PMode是以Z轴下降的位置来检测的ParameterDefault / Allowable Range FunctionContact Threshold 1Default = 70 %Min = 10 %Max = 90 % 接触灵敏度,就是焊头下降过程中检测到芯片和框架的灵敏度,其实是一个比例值。
例如:但CV=1.0mils/s 时,70%就是表示伺服系统知道已经接触到被压焊表面时的速度为0.3mils/sForce Profiling 1TIP1Time 1Actual USGTimeUSGPre_DelayUSGBondhead Actual PositionI.F.TF.R.TForceInitial ForceInitial ForceForceWhen Initial Force > Bond ForceWhen Initial Force < Bond ForceDefault = offMin = offMax = on第一点压力输出波形控制,是开关功能,打开后以下三项将会起作用 Initial forceIniltial force time Force ramp timeParameter Default /Allowable RangeFunctionInitial Force 1 Default = 65 gramsMin = 0 gramsMax = 350 grams 第一点压力应用前,在检测到劈刀碰到表面时就开始应用Initial Force Time 1 Default = 33 %Min = 5 %Max = 100 % 第一点初始压力的作用时间,是比值单位,是以bond time为基准的比值Force Ramp Time 1 Default = 10 %Min = 0 %Max = 100 %X Scrub Default = 0 micronsMin = 0 micronsMax = 10 microns Table的高频震动,正常的超声输出将在研磨完成后才输出,一般不建议使用Y Scrub Default = 0 micronsMin = 0 micronsMax = 10 micronsScrub Cycle Default = 2Min = 0Max = 10一个micron相当与2.4msParameter Default /Allowable RangeFunction Scrub Phase Default = 90 degMin = 0 degMax = 180 degLife Throttle Default = 100%Min = 1%Max = 100% 焊头脱离挤压金球开始往上升到第一个转折点(kink height)起动速度的大小。
Seating USG 安置超声波,在劈刀下降过程中的一个超声的能量输出,目的是协助金球落在劈刀中心,参考值为:50-100mA1.1.2 Second Bond ParametersParameter Default /Allowable RangeFunction Tip 2DieLead Tip2TOLHi-speeddescend Default = 2 mils Min = 0 mils Max = 25 milsCV 2 Default = 1 mils/msMin = 0.2 mils/msMax = 3.0 mils/msParameter Default /Allowable RangeFunctionUSG Mode 2USGOutputLead Default = C. Current Min = C. Power Max = C. VoltageUSG Power 2 Default = 400 mWMin = 0 mWMax = 4000 mW USG Volts 2 Default = 7000 mVMin = 0 mVMax = 16000 mVParameterDefault / Allowable Range FunctionUSG Current 2Default = 100 mAMin = 0 mAMax = 250 mAUSG Bond Time 2USGLeadForce12Default = 7 msMin = 0 msMax = 3980 msForce 2Default = 85 gramsMin = 0 gramsMax = 350 grams-ParameterDefault / Allowable Range FunctionPower Equ PF (USG power factor) Default = 100 % Min = 0 % Max = 200 % 超声输出的X 方向的平衡补偿 Force Equ FF (bond force factor) Default = 100 % Min = 0 % Max = 200 % 压力输出的X 方向的平衡补偿Z-Tear State Default = Off Min = Off Max = OnZ-Tear USGLead Wire clamp closedLead Fixed Tear DistanceZ-Tear USGZ-Tear SpeedTailingTearing1413Default = 0 mAMin = 0 mAMax = 250 mA第二点扯线时的超声输出,Z-Tear SpeedDefault = 100 %Min = 40 %Max = 100 %扯线速度ParameterDefault / Allowable Range FunctionCap OffsetBonding directionTarget bond positionActual bond positionPositive Cap. Offset causes the actual bond position to be inopposite of the bonding directionNegative Cap. Offset is used to bring thecrescent onto the middle of the leadfinger, same as the bonding directionDefault = 0 milsMin = -20 milsMax = 20 mils第二点的劈刀偏移量USG Profile 2 Default = RampMin = RampMax = BurstRamp Up Time 2Default = 10 %Min = 0 %Max = 75 %Ramp Down Time 2Default = 0 %Min = 0 %Max = 25 %Parameter Default /FunctionAllowable RangeBurst Time 2 Default = 1.5 msMin = 1.5 msMax = 3.0 msBurst Level 2 Default = 125 %Min = 100 %Max = 200 %USG Pre-Delay 2 Default = 0 msMin = 0 msMax = 10 msContact Threshold 2 Default = 70 %Min = 10 %Max = 90 %Force Profiling 2 Default = offMin = offMax = onInitial Force 2 Default = 115 gramsMin = 0 gramsMax = 350 gramsInitial Force Time 2 Default = 33 %Min = 5 %Max = 100 %Force Ramp Time 2 Default = 10 %Min = 0 %Max = 100 %Parameter Default /Allowable RangeFunctionTAIL MODE(OFF,Z-XY or XYZ) 减弱第二点的鱼尾线撕裂,线弧飘或者发生,在其它参数调整最佳之后的调整项会影响UPH OFF 正常只有z 轴上升的动作Z-XY 指z轴先上升到达线尾高度时xy轴再移动XYZ 指XYZ轴同时移动与上升XY DISTANCE(milS) 指沿着线的方向扯线的移动距离,正是往第一点方向靠近,负是远离第点方向SCRUB PHASE MODE 研磨生物相位的模式,决定研磨的方向0(VAY) 使用设定相位来调整1(CIRCLE)对所有的金线都呈现圆形化的研磨2(IN LINE)延线的方向研磨2nd scrub mode 第二点研磨开始的时机With USG 研磨是与超声输出同时开始的Pre USG 研磨是在超声输出前已经开始2nd XY SCRUB(micron)第二点是以微米为单位的平台研磨幅度2nd SCRUB CYCLES 研磨的次数2nd SCRUB PHASE 0 degrees与所有的线弧成垂直研磨90degrees对正交的垂直研磨,其它的圆形研磨180degrees对正交的垂直研磨,其它的沿线的方向研磨TAIL XY SCRUB 尾丝是以微米为单位的平台研磨幅度TAIL SCRUB PHASE 0 与线的方向一致1 与线的方向正交垂直2 圆形的TAIL SCRUB CYCLES 研磨次数TAIL SCRUB FREQUENCY(Hz) 研磨频率TAIL SCRUB MODE(0 OR 1 ) 0 研磨并没有接触焊点表面Tail Scrub height定义高度1 研磨时接触焊点表面TAIL SCRUB OFFSET 根据送线方向的一个补偿距离,新的位置是研磨的新坐标点TAIL SCRUB USG 研磨时的次数输出量,以第二点的%来计算TAIL SCRUB FORCE 当研磨与表面接触时,与研磨同时作用的压力的大小TAIL SCRUB HEIGHT 非接触研磨时的的研磨高度1.2 Looping Parameters ParameterDefault / Allowable Range FunctionKink HeightDieKink HeightDefault = 8 milsMin = 0 milsMax = 100 milsReverse MotionDieReverse MotionKink heightBondhead Traje ctory7Default = 8 milsMin = -10 milsMax = 150 mils-Parameter Default /Allowable Range Function Rmot AngleDie Die Die60 degDieLeadDieDieLead90deg120degLeadDefault = 90 degMin = 0 degMax = 180 deg-Loop FactorDieLoop Factor too large (loosen/sag loops)Loop Factor too small (tight loops)LeadDefault = -5 milsMin = -25 milsMax = 10 mils-ParameterDefault /Allowable Range Function TOL CorrectionDieTOL Correction = OnTOL Correction = OffTOL(Top Of Loop)8Default = offMin = offMax = onLF3DieLeadLF3Default = 0 milsMin = 0 milsMax = 20 mils对帮助稳定线弧的稳定起到一定作用Parameter Default /Allowable RangeFunction Flat LengthDieFlatLengthDieLeadFlatLengthDefault = 0 milsMin = 0 milsMax = 150 mils线弧的平台长度Shape FactorDieDieLeadShapeFactorDefault = 0 degMin = 0 degMax = 90 deg–等同于1488中的thetaParameter Default /Allowable Range FunctionContact AngleLeadContact Angle = 10(at 45 deg with vertical)Contact Angle = 0(at 0 deg with vertical)Tip2Default = 0Min = 0Max = 10- 接触角度- 主要控制劈刀头接近第二焊点的路径- 0表示到第二点的正上方垂直下降接触到第二点Contact OffsetDefault = 0 milsMin = 0 milsMax = 5 mils压在第二点的平移值,要谨慎使用次参数LF4Default = 100 % Min = 1 %Max = 100 %- 拉弧速度Bleed VoltageDefault = 1000 mVMin = 0 mVMax = 5000 mV- 当焊头在完成反向移动后的上升阶段的输出超声,目的是为了更好的保证金线从劈刀中穿过时的平稳。