0.5 0.4 0.3 0.2 0.1
2.5
Stepping angular: 0.072 /step (Sensor sensitivity: 6.7nm/mV)
o
45 30 15 0 0.0
Sensor voltage (V)
2.4
0.10 m
Power (N.m/S)
2.3
2.2
0.0 0.5 1.0 1.5 2.0 Torq (Kg.cm) (i) Input power: 8.0W/ step: 2W (ii) The max. speed: 60 rpm; (iii) The max. torque output: ~2 kg-cm; (iv) Max. out power: 0.45W
讲座内容
• 概述
• 压电微马达
• 压电与磁电驱动器
• 总结
第四次全国超声电机技术研讨会 CVUEC & WUMTC—2012.10.12-15
第一部分：概述
• Piezoelectric Effect
•
Work Principle of Piezoelectric
Applications
第四次全国超声电机技术研讨会 CVUEC & WUMTC—2012.10.12-15
USA H.C.Materials company
2500
1400
d31 vs.temperature
2000
PZN-8%PT
1200 1000
PZT-5H
(Normal cut )
d33(pC/N)
-d31 (pC/N)
1500
800 600
Value for PZT Ceramic at Room Temperature
Properties of PMN-PT/Ti-alloy traveling wave motor
Speed-torque, power-torque, and step relationships
PMN-PT traveling wave motor
75 60
Speed (RPM)
Vdrive=100 Vpp; f = 44 kHz
PIN-PMN-PT samples from Shanghai Institute of Ceramics (Sizes：1.5mm x 1.5mm x 5mm)
Figure 2. (a) The domain configurations under no bias after poling in rhombohedral PIN-PMN-PT crystals; (b) the figures of the [001]L/[ 1 10]W/[110]T oriented wafer under bias along [110] after poling.
• 压电晶体微马达
•
压电陶瓷微马达
空间应用需求—低温、高精密驱动
Deformable Mirrors using Piezo-actuators for Optical Communications/image corrections
Optical communication between a mobile ground post and an unmanned flight.
Deformable mirror is designed with 341 piezoactuators for High-energy Laser Beam Control
Why Piezoelectric Single Crystal Actuators?
Single Crystal is characterized with large piezoelectric coefficient at both room temperature and cryogenic temperature.
Single Crystal Rotary-type Piezo Cryomotor
---modified from Fukoku Co.’s ring-type traveling wave motor Structure design of modified piezoelectric traveling motor
Work Principle of Piezoelectric Motors
-- based on piezoelectric effect to convert input electric energy into mechanical motions in following three modes: Travelling wave Standing wave Wobbling motion
2.1 -2 0 2 4 6
Time (s)
Step at 0.072°/step
Step measured results
第四次全国超声电机技术研讨会 CVUEC & WUMTC—2012.10.12-15
Low-temperature motion movie
Liquid N2
Scale disc
Resolution: < 1nm
Low Voltage 21 m at 150V, RT
10 mm
Piezo-actuator’s stroke ranges are very limited!
Piezoelectric Single Crystal Linear Motors
Why Ultrasonic Motor?
1000
400
500 d = 393 pC/N @ 30K
33
d33 vs. temperature
300 350
200 0 0 50 100 150 200 250 300 350
0 0 50 100 150 200 250
Temperature (K)
Temperature (K)
Jiang et al. ASME Conference Proceedings, 2004
•Traveling speed: 50-100mm/sec
•Very quick direction reverse •Max. driving force: 200 gram.
•Weight Loading: > 1kg
•Successfully operated in liquid N2
A center wobbling linear motor
Micro flying Roberts
Medical endoscopes
Precise Piezo- Positioners
PI piezo-actuators
Piezoelectric Motors Market in China
• 精密直线压电驱动器
主要是德国PI公司的精密压电驱动器 Nanomotion 直线压电驱动器 中国销售：>￥2000万/年
Can Output axis and needle
Temperature meter
PMN-PT motor
Bas e Cryogenic test of PMN-PT motor at T = -201 °C
Piezo-Single-Crystal Micromotors for Lens Drive
Why piezoelectric single-crystal micromotors? • Higher power density in small sizes • Low-voltage drive • Superhigh driving force
PIN-PMN-PT Single Crystal Linear Motor
Shaft Rotor Spring Traveling motion
Ti-alloy
Bearing
Piezo-single crystal stator
PMN-PT stator
Photo of assembled PMN-PT/Ti-alloy traveling motor modified from Fukoku’s PZT motor
• 旋转型超声行波电机
国防领域、其它驱动：存在电磁电机的竞争。。。
• 纺纱用压电驱动器 中国销售：> 5000万/年 • 中国潜在市场： 手机驱动，10亿/年
第四次全国超声电机技术研讨会 CVUEC & WUMTC—2012.10.12-15
第二部分：压电微马达发展 Part II：Piezoelectric Micromotors
intermediate
Features of Piezoelectric Motors
Advantages:
• High power density • High driving force • Precise positioning ability • High efficiency in millimeter sizes
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directed laser energy for missile defense!
/agc/special/subaru/index_e.html
Active Optics and Deformable Mirrors in Space
Satellite-to-satellite free-space optical communications /index/photonics-technologies-applications/
~up to 2,000 corrections / sec!