• 2. 主要用途介紹:
* CDA–作為Fab中氣動設備(如Pump )的氣源及吹淨( Purge )作為Local Scrubber 助燃的氣源
* IA–作為廠務系統氣動設備的氣源及吹淨( Purge )
* HPCDA–黃光區Scanner 機台專用( 移動平台/ 使Filter 緊靠) * GN2/ PN2-作為部分氣動設備氣源及提供惰性的氣體環境
Pn2 主要的功能為吹淨( Purge )
* PO2 -提供製程中氧化的作用
* PAR–作為製程中濺渡的傳導介質
* PHE-作為製程中冷卻晶片的氣源
* PH2-提供燃燒,烘烤的作用及其他反應
V V
V
PHE V
V
PH2
V V V PAR V V V
V PO2V
V V V V PN2V V V V V GN2V HPCDA V
V
V
V V
CDA Implant Thinfilm
Etch Photo Diffusion
Gas Name • 3. 製程與氣體的分佈:以SMIC FAB2 為例
Vaporizer
• 4. Bulk Gas 供應系統介紹:
V
V
V
He
V V V V
H2V
Ar V V
O2V V N2V
CDA Compressor 壓縮機
Bundle 集束鋼瓶
Trailer 槽車
Container 儲存罐
Storage tank 桶槽
Produced on-site
GAS TYPE
CDA flow sheet:
N2 flow sheet:
O2 flow sheet:
Ar flow sheet:
H2 flow sheet:
He flow sheet:
Liquid Gas Toxic,Corrosive,Yellow
Color,Nonflammable
Chlorine 氯氣Cl 2Liquid Gas Toxic,Corrosive Trifuorochloride 三氟化氯ClF 3
Compressed Gas Flammable,Colorless,Combustible Methane 甲烷CH 4Liquid Gas Flammable,Colorless,Liguefied Methylsilane CH 3SiH 3
Liquid Gas Toxic,Flammable,Colorless,Odorless Halocarbon-32CH 2F 2
Compressed Gas Flammable,Colorless,Incombustible Methyl Fluoride 氟代甲烷CH 3F
Liquid Gas Colorless,Incombustible,Nonflammable Halocarbon-23三氟甲烷CHF 3
Liquid Gas Colorless,Incombustible Monochlorodifluoromethane CHClF 2
Compressed Gas Inert,Colorless,Incombustible,Nonflammable Halocarbon-14四氟化碳CF 4
Liquid Gas Toxic,Corrosive,Colorless,Nonflammable Boron Trichloride 三氯化硼BCl 3
Liquid Gas Toxic ,Flammable ,Colorless,Combustible Arsine 砷化氫AsH 3
Compressed Gas Inert,Colorless,Incombustible,Nonflammable Argon 氬氣Ar
性質特性Product Name Chemical
Symbol
氣體特性表
V C4F8
V CL2
V CLF3
V V NH3
V WF6
V F2/KR/NE V V SIH4
V V DCS
V NF3
V V N20
V He/O2(0.5%)
V CF4
Implant Thimfilm Etch Photo Diffusion Gas Name
• 3. 製程與氣體的分佈:以SMIC 為例
• 4. Specialty Gas 供應系統介紹:
SP1 SCOPE -
* Gas Cabinet 氣瓶櫃
* Gas Rack 氣瓶架
* Y-Cylinder
* Bundle 集束鋼瓶
* Trailer 槽車
SP2 SCOPE -
* VMB 閥箱
* VMP 閥盤
Gas Cabinet / Gas Rack 概述:
1. 可分為單鋼/ 雙鋼( 2 Process ) / 三鋼( 2 Process + 1 N2 )
2. 依氣體特性來設計盤面功能:
for example: smic fab2
3. 安全功能: Shut Boy 鋼瓶閥, UV/IR 火焰偵測器, Sprinker 灑水頭,
EMO 緊急停氣按鈕, DPS/DPG 洩漏偵測器……
V V DCS
V 高壓測漏HP 加熱裝置HEAT V 冷卻裝置COOL
V V CL2V WF6
V SIH4
電子磅秤LC 過流量計
EFS
VMB / VMP 概述:
1. VMB —Valve Manifold Box (閥件分流箱)
VMP—Valve Manifold Panel (閥件分流盤)
2. 一般可設計成4-stick / 8-stick / 10-stick , 視各案情況
3. 依氣體特性及業主需求來設計盤面功能
4. 安全功能: EMO 緊急停氣按鈕, DPS/DPG 洩漏偵測器, 防爆鋼絲玻璃……
•SMIC FAB2 GAS PIPING SPEC. :
Single S.S.316L-EP
EP
4%H2/N2
S.S.316L VIM+VAR Heat tracing V+V Heat SiH2Cl2Single S.S.316L-EP
EP NO Double Wall S.S.316L-EP stainless steel fiting Double EP CO Single S.S.316L-EP
EP 10%CH4/Ar Double Wall S.S.316L-EP stainless steel fiting EP NF3Single S.S.316L-EP
EP C5F8
Single S.S.316L-EP EP CH2F2Single S.S.316L-EP EP CH3F Single S.S.316L-EP EP N2O Toxic/Flammable gas
Gas piping type Gas piping type Gas name Gas type
Double Wall S.S.316L-EP
Double EP
1%PH3/N2
Double Wall S.S.316L-EP Double EP SiH4
Pyrophoric gas
Single S.S.316L-EP EP HCl Single S.S.316L-EP EP SiF4Single S.S.316L-EP EP 0.9F2/1.2%Kr/Ne Double Wall S.S.316L-EP Heat tracing Double EP Heat WF6
S.S.316L VIM+VAR
V+V
HBr S.S.316L VIM+VAR V+V Cl2
S.S.316L VIM+VAR V+V NH3Double Wall S.S.316L VIM+VAR Heat tracing Double V+V Heat ClF3S.S.316L VIM+VAR Heat tracing
V+V Heat BCl3Corrosive gas
Gas piping type
Gas piping type Gas name Gas type
Single S.S.316L-EP
EP
1.2%Kr/Ne
Single S.S.316L-EP EP He/O2(30%)Single S.S.316L-EP EP He/O2(0.5%)Single S.S.316L-EP EP CO2Single S.S.316L-EP EP 1.2%HE/N2Single S.S.316L-EP EP SF6
Single S.S.316L-EP EP C2F6Single S.S.316L-EP EP C4F8Single S.S.316L-EP EP CHF3Single S.S.316L-EP EP CF4Inert gas
Gas piping type Gas piping type Gas name Gas Room type。