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ITO的回收再生及新型透明导电膜材料的近况发展


12 mm Phone 3 (b)
2.
/GPS/
1
2
(a)
(b)
(c)
(a) Apple
iPhone
(b) LG
Prada Phone
(c) Motorola
ROKR E6
Industrial Materials Magazine
205
GPS GPS 7
(Nintendo)
DS (Dual Screen) 2
2. IZO
IZO (Indium Zinc Oxide) 7-10 wt% ZnO ISEM (Idemitsu) IZO TFT OLED TFT IZO In2O3
Umicore Indium Products Alfa Aesar Belmont Metals Inc. MCP Metalspecialities Inc. Mining&Chemical Products Omodeo A&S Metalleghe S.r.l. Whitmetaal BV. Korea Zinc
8
1000
2012 1000
(IEK)
58% IEK
12% 2007
Industrial Materials Magazine
202
50% 7
4 (CMC) Technology) 4
4
8000 (Transtouch 2.
2010 IT 35 Single-touch 2010 5 10 25% 8
iPhone Multi-touch 2007 1 2007 1290 4 3310 10 20% 2012 4 Component Film ITO ITO Film PET
Upstream
Materials Components ITO Glass
Glass Substrate
PET Film
ITO Target
1. ITO
Sharp 3.5
Color Filter LC
Opening
Black Matrix
Photo TFT
Readout TFT
TFT Array
Industrial Materials Magazine
208
(Shutter) 60~65%
ITO Cycle Time
(Patterning) ITO 3~10 wt% ~10 Ωcm
Al Al
B
Ga
Ti ZnO
Zr
27cm /Vsec GZO
(Al2O3) AZO (ZnO:Al2O3) GZO(ZnO:Ga2O3)
200 nm 100 nm (b) FE-SEM TEM c15~25 nm GZO
International 2007 (190µΩcm) FPD
GZO
Industrial Materials Magazine
ITO Film
3M
Glue TAB Material
Controller IC
Midstream
Panels Modules
LCD Panel Makers
Touch Panel Makers System Integrators
Downstream
End-Products
Consumer Products PDA, PDAphone iPhone, iPod, PMP ... IEK (2007)
85~91%
92%
92%
90%
DC ITO
DC
Nissha, PED, Gunze, Fujitsu, Young Fast, J Touch IEK (2007)
3M Touch System
ELO, Fujitsu
eIT, IRTouch
WACOM
95% ATM NB iPhone 50~250
Indium Prices-Metal Bulletin ($US)
1,250
Suppy/Demand mt
Avg. Price
1,000 800 600
1,000 750 500 250 Supply Demand
Uses
928 1114 1281 210 -12 49 245 -39 10 274 -43 -33
Automotive Products Car Display PND/GPS ...
IT Products UMPC Tablet ...
Industrial Applications Kiosk ATM Industrial
Industrial Materials Magazine
203
/
85%
(In)
Industrial Materials Magazine
209
10%
ITO 1g
15
Sharp
2006
1
DOWA Metal Mine
Asahipretec
2005 Rare Metal 2~3 11 150 2007 30 50 2005 19 11 12
Teck Cominco Xstrata plc IBFalconbridge) ( Umicore S.A. The Chelyabinsk Zinc Works PPM Pure Metals GmbH Fremat GmbH&Co. Indium Corp. Xstrata
3.
(ZnO)
Zn ITO ZnO 150°C 8×10 cm
20 2 -3
Ion-plating GZO Ga 2×10-4Ωcm (Hole) 90% 170nm/min (a) 2×10 Ωcm
-4
4 wt% (Mobility) GZO
In Hf 500°C ZnO Ga2O3 Tosoh ZnO ITO ZnO
ρ560nm = 1.8×10-4Ωcm
I 1.0E-04 0
II 100 200 300 400 500 Film Thickness (nm) c-axis 600
90% (OH)2 H2O
(b)
GZO
GZO Glass Substrate Polycrystalline Columnar Structure Lateral Grian Size ~15-25nm / High Level of Orientation along the c-axis
Apple PDA
iPhone MP3 GPS POS
KIOSK
ATM ITO
(In)
ITO
2012 iSuppli Japan 7 2006 2012 2006 10 6 1.8 8000 9000 24 2000 44 2011 2012 1.6 30% 14% 60% 2007 1.8 6
2.7 GPS
1.
2002 2007 UMPC 2 ITO 4 PDA GPS 4 5 6 8 1000 4
Industrial Materials Magazine
204
Apple Web iPhone (Projected) PDA MP3
4
(a)
iPod Motorola (c) iPhone 2.4~3.2 LG PRADA 2007 Prada ITO ROKR E6
(P-3m1)
Mg(OH)2-C (OH)2 C C X Mg(OH)2
Mg
1.0E-03
Resistivity (ohm·cm)
ρ30nm = 4.4×10-4Ωcm
(a)
Mg(OH)2-C
Ga: 4 wt.%
10-1Ωcm 400nm
ITO Network 83% 330°C 100°C
10-4Ωcm 650nm Mg MgO
-4
2 (In2O3) ITO 80~90% Virgin 2005
30 Cycle Time
2008 15
(SnO2)
ITO 2006 500 ppm 50 ppm FPD
(Reclaim)
CIGS 2007
2002~2003 2005 900 750 ITO 30% 70% ITO / 90% / 70%
Touch Window
(b) Display
1. (All-in-One)
(Cover)
(a) Nissha Printing Co.
(c)
Epson Imaging Device
2007
10
(a) (c) Nissha Touch Window
(b)
Industrial Materials Magazine
201
New Applications and Development of Touch Panel and Transparent Conductive Film Materials
S. C. Liu1 C. H. Chang2
(Editing Group)1 (MCL/ITRI)
2
2007 Notebook
(a)
X C
211
1. Mg(OH)2-C
Mg-C RF Sputtering 2007 10 Mg-C Couple Mg(OH)2 15
Mg
Mg(OH)2-C Mg(OH)2 Network
3.5µm Mg(OH)2
(b)
(Hexagonal Structure) Mg(OH)2-C c
RF Magnetron Sputtering (0.5Pa) Mg80-C20
Al
Al
3+
Zn ZnO Al
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