2CO + O2 → 2CO2 CH4 + 2O2 → CO2 + 2H2O 2H2 + O2 → 2H2O
•被 CH4[沼气] 去掉 •在300 – 400 ℃
Regeneration [再生]
350 ℃ M/S-H2O → M/S + H2O M/S-CO2 → M/S + CO2
FM
在 200 – 300 ℃ 纯化后气体
A Column
B Column
C_Catalyst
Electric Part Match with Heater
H2 Purifier MCCB
ELB 1
ELB 2
ELB 3
ELB 3
MC 1
MC 2
MC 3
MC 4
MC 5
MC 6
CP 1
CP 2
CP 3
CP 4
CP 5
CP 6
SSR 1
SSR 2
纯化办法
吸附物 (Absorber)
MS (Molecular Sieve) = Absorber[吸附物 ] MS能去掉 CO2,H2O (不必加热) MS+H2O,CO2 → MS-H2O,MS-CO2 MS要再生课程 (在加热),所以不必更换 MS-H2O,MS-CO2 → MS,H2O,CO2
If heater is on,Compare Heating Temperature with Temperature Setting [HEATER在加热的话, 比较 加热温度 跟 温度设定] Check Whether‘PROCESS COLUMN’temperature is normal or not(≤50℃) [确认 纯化部分(吸附物)的温度, 它应该 50 ℃以下]
Shut Down[关闭] & Restart Procedure
■ Shut Down [关闭]
CQC Close [闭] MV2 Close [闭] MV4,5 Close [闭] EMO PUSH [EMO 按]
N2
MV1 Close [闭] CP 8,9,10 Close [闭] MCCB Close [闭]
2Zr + N2 → 2ZrN 2Zr + CO → ZrC + ZrO 3Zr + CO2 → ZrC + 2ZrO 2Zr + H2O → Zr(H2) + ZrO 3Zr + CH4 → ZrC + 2Zr(H2)
Regeneration [再生]
M/S-H2O → M/S + H2O M/S-CO2 → M/S + CO2 NiO + H2 → Ni + H2O Ni(CO) + 3H2 → Ni + CH4 + H2O * 在 200 – 300 ℃ (250 ℃ )
纯化(PURIFYING) 是什么 ??
纯化以前
纯化以后
O2 H2O CO CH4 N2 N2 CH4 CO2 CO CH4 O2 CO CO2 O2 N2 H2O O2
纯化器
H2O
CH4
H2O
CO
CO2
气体的纯度是5N(99.999%) 99.999%=杂质浓度是 百万之十 (10ppm)
气体的纯度是8N以上(≥99.999999%) 99.999999%=杂质浓度是 十乙之十 (10ppb)
ELB 1
ELB 2
ELB 3
MC 1
MC 2
MC 3
MC 4
MC 5
CP 1
CP 2
CP 3
CP 4
CP 5
CP 6
CP 7
SSR 1
SSR 2
SSR 3
SSR 4
SSR 5
SSR 6
SSR 7
Heater 1
Heater 2
Heater 3
Heater 4
Heater 5
Heater 6
Heater 7
GETTER
300 ~ 400 ℃
ACA (Ni催化剂– 吸附 方式)_N2 Purifier
Purifying [纯化]
催化剂 反应
MFC
纯化前气体
O2
Waste Gas 吸附 反应 Ni 催化剂 Ni 催化剂
2Ni + O2 Ni + CO
→ 2NiO → Ni(CO)
M/S + H2O → M/S-H2O M/S + CO2 → M/S-CO2
纯化办法
催化剂 (Catalyst)
Ni,Pd = Catalyst Ni能去掉CO,O2 (不必加热) / Pd能去掉CH4 (在加热) Ni+CO,O2 → Ni-CO,Ni-O2 / Pd+CH4 → Pd+CO2,H2O Ni要再生课程 (在加热,H2) , Pd没有再生 Ni-CO,Ni-O2 → Ni,CO2,H2O
Alarm Check [确认 警报]
Check whether purifier has any alarm or not [确认 纯化器有没有警报] Check ‘ALARM SUMMARY’ after last check time [确认 ‘ALARM SUMMARY’最近确认以后]
Temperature Record [记錄 温度]
Pressure Record [记錄 压力]
Check O2 pressure should be higher than N2 (N2 Purifier) [O2压力高于N2...N2 纯化器] Check GN2 pressure because GN2 is supplied into Solenoid valve of N2,O2,H2 Purifier GN2 pressure should be higher than 4 kg/cm2(60psi) [确认 N2压力高于4KG/CM2(60PSI),因为GN2用在 N2&H2&O2 纯化器的 SOLENOIDE VAVLE] In case of regeneration, Regen.Flowmeter should be between Set Range [再生的时候 (Heating/Cooling) 流量是不是设定??] N2 Purifier : If Main Flowmeter is below 250,O2 MFC should be “0”, Otherwise “2” [N2纯化器 : N2流量小于250的话,O2 MFC设定 “0”,高于250 设定 “2”]
Pd [钯] 催化剂
* 常温反映
吸附物质
Hale Waihona Puke 250 ℃CV吸附物质
Regeneration [再生]
H2 催化剂 反应 吸附 反应 纯化后气体
FM
Palladium [钯]
2CO + O2 → 2CO2 CH4 + 2O2 → CO2 + 2H2O 2H2 + O2 → 2H2O •把 CH4[沼气] 去掉 •在300 – 400 ℃
Relay ELB
PLC Signal→On 有信号 开
MC Temp Controller CP SSR Heater
MCCB : Molded Case Circuit Breaker ELB : Electric Leakage Breaker MC : Magnetic Contact CP : Circuit Protector SSR : Solid State Relay PLC : Programmable Logic Controller
NiO + H2 → Ni + H2O Ni(CO) + 3H2 → Ni + CH4 + H2O M/S-H2O → M/S + H2O M/S-CO2 → M/S + CO2
* 在 200 – 300 ℃ (250 ℃ )
ACG (Ni_催化剂-吸附- Getter 方式)_H2 Purifier
SCR 1
SCR 2
SCR 3
SCR 4
Heater 1
Heater 2
Flowmeter Record [记錄 流量計]
Check PCW [确认 PCW 共给]
Check whether PCW is supplying into Purifier or not [确认 PCW 共给]
Electric Part Match with Heater
N2 Purifier MCCB
纯化前气体 纯化后气体
Waste Gas
Purifying [纯化]
Ni 催化剂 Ni 催化剂 M/S + H2O → M/S-H2O M/S + CO2 → M/S-CO2
Getter
2Zr + O2 → 2ZrO
GETTER
吸附物质
* 常温反映
250 ℃
吸附物质
2Ni + O2 → 2NiO Ni + CO → Ni(CO)
SSR Fail Alarm [继电器故障警告] Leak Detector 2ND Alarm
MC Fail Alarm [继电器故障警告] CP Fail Alarm [短路器故障警告]
Warning Alarm
• Gas Supply Continue [不影响 气体共給]
ELB Fail Alarm Air Fail Alarm [CDA 共给压力不够警告]
FM
*在 300 – 400 ℃
ACA (Pd_催化剂 – 吸附物 方式)_O2 Purifier