Surfscan表面污染分析儀 (Surfscan4500)

Hardware:

(1) Wafer-handling system

(2) Laser-based scanning system

(3) Printer

機台用途: 掃描矽晶片上污染粒子分佈狀況

Partical range: 1.52um² to 4.76 um² up

Gas requirement: N2

Taiwan agent: 國芯科技

Contact info. 鄭春國先生 / 0926436041

Update: 08 / 10 / 2005

Description of Surfscan

Substrate: Si wafer Substrate size: 6吋及四吋矽晶片

4-point prob.四點探針

Hardware:

(1) 4-point prob.四點探針

(2) Printer

機台用途: 測量矽晶片電阻值

功能描述: 五點自動量測及單點手動量測

Gas requirement:

None

Measurment range: 10E-3 to 80K Ω∕cm²

Update: 08 / 10 / 2005

Description of 4-point prob.四點探針 Substrate: Si wafer

Substrate Type: P and N type wafer

Substrate Size: > 5cm x 5cm