0.875
0.283
35.3 100 353 1000 3530 10000 35300 100000 353000 1000000 3530000 10000000
8.75 30 87.5 300 875
2.83 10 28.3 100 283 1000 2830 10000 28300 100000 283000 7698 21614 26980 216140 769800 2161400 218 612 2180 6120 21800 61200 1695 4672 16950 46720 169500 467200 48 132 480 1320 4800 13200 706 1908 7060 19080 70600 190800 20 54 200 540 2000 5400 247 618 2470 6180 24700 61800 7 17 70 170 700 1700
0.3um volume units m
3
0.5um volume units m
3
3
1um volume units m
1
3
2um volume units m
3
3um volume units m
3
5um volume units m
3
English
ft
3
ft
10
3
ft
3
ft
3
ft
3
ft
3
30.9 106 309 1060 3090 10600 30900
B. Generate no dust不生成任何粉塵 不生成任何粉塵
Be sure to wear dust-garment
人員穿著無塵衣
Don’t use any material or equipment which generates dust easily
不e nothing without necessity
不作非必要的移動
Bring no disused articles
不攜入廢棄之物品
6
Primary methods to keep clean 清潔維持準則
C. Accumulate no dust不累積粉塵 不累積粉塵
Not to make any such corner or sounding of equipment, which makes cleaning difficult
10
General operation discipline 一般運作準則 一般運作準則
C. Working principles工作守則 工作守則
All cleanroom staff have to take the cleanroom discipline course and pass the course test before entitling to enter cleanroom 所有潔淨室人員需經潔淨紀律訓練並測驗合格後, 所有潔淨室人員需經潔淨紀律訓練並測驗合格後 才可進入潔淨室 No make-up (such as lipstick, powder, perfume) in cleanroom 進入潔淨室不可化妝 Wait at least for 10 minutes to enter cleanroom after smoking 吸菸後10分鐘內不可進入潔淨室 吸菸後10分鐘內不可進入潔淨室 No picture-taking without authorized 未經核淮不得照相 In air-shower room (洗塵室內 洗塵室內) 洗塵室內
人員進入需更換無塵衣, 鞋, 並經由air shower進出 人員進入需更換無塵衣 並經由 進出
Never move material and equipment into the room without cleaning
任何物料設備進入皆應先清潔
5
Primary methods to keep clean 清潔維持準則
Test
測試
2
What is cleanroom 何謂潔淨室
Cleanroom is defined as“a specially constructed room where the air supply, air distribution, dust and airborne particle, room pressure, temperature, humidity, noise, and vibration are environmentally required to meet appropriated cleanliness level”
Limited to 2 persons in air-shower room at a time洗塵室以 人為上限 洗塵室以2人為上限 洗塵室以 Hands off the wall雙手不可靠牆 雙手不可靠牆 Rest your arms on hips and sway your body while air is blowing吹氣時 雙手叉腰並擺 吹氣時, 吹氣時 動身體 When air stop blowing, wait for 5 seconds to enter cleanroom吹氣停止 秒後才可開門進 吹氣停止5秒後才可開門進 吹氣停止 入潔淨室
Hepa過濾網 框架無粉塵滲漏 過濾網, 過濾網
Keep positive pressure in the room
潔淨室內維持正壓
Please change clothes and shoes, then walk through air shower before entering the room
Information above shows that human is the largest source of generated particle which is fatal for product. Therefore, be sure to follow strictly all the rules defined at “General operation spec in working area” 上述資料可知人是粉塵的最大來源, 而粉塵是產品的致命傷, 上述資料可知人是粉塵的最大來源 而粉塵是產品的致命傷 因此請您 務必遵守“工作區一般操作規範”中所訂之各項條文。 務必遵守“工作區一般操作規範”中所訂之各項條文。
3
Federal Standard 209E Airborne Particulate Cleanliness Classes
Class Limit Class Name SI
M1 M 1.5 M2 M 2.5 M3 M 3.5 M4 M 4.5 M5 M 5.5 M6 M 6.5 M7 100000 10000 1000 100 10 1
提供適當的空壓以避免髒點附著在產品上
8
General operation discipline 一般運作準則 一般運作準則
A. Relation between human and particle人與粉塵之關係 人與粉塵之關係
Breathing generates 2200particles per minute Hair and beard generate 4500particles per minute Naked hands generate 1930particles per minute Cloth generates 5600particles per minute Walking generates 5500particles per minute 呼吸每分鐘產生2200個粉塵 個粉塵 呼吸每分鐘產生 髮,鬚每分鐘產生 鬚每分鐘產生4500個粉塵 個粉塵 鬚每分鐘產生 裸手每分鐘產生1930個粉塵 裸手每分鐘產生 個粉塵 衣服每分鐘產生5600個粉塵 個粉塵 衣服每分鐘產生 人體走動時每分鐘產生5500個粉塵 人體走動時每分鐘產生 個粉塵
9
General operation discipline 一般運作準則 一般運作準則
B. Constraint on the use of articles in cleanroom 潔淨室之物 品管制
Write only in ball-point-pen or oil-type maker. Pencil, water-type maker, eraser, liquid correction etc. are forbidden to use. 書寫一律用原子筆或油性簽字筆, 不得使用鉛筆, 水性簽字筆, 橡皮擦, 書寫一律用原子筆或油性簽字筆 不得使用鉛筆 水性簽字筆 橡皮擦 修正液 No paper is allowed to use except the cleanroom paper 除潔淨室用紙外, 除潔淨室用紙外 其餘紙類不得於潔淨室使用 All non-cleanroom documents must be covered with plastic film and wiped clean before being sent to cleanroom 文件規範如以非無塵紙複印者, 須加以塑膠套封裝, 文件規範如以非無塵紙複印者 須加以塑膠套封裝 擦拭乾淨後再送入潔淨室 By request of the job, it should be authorized by section manager for engineering drawings which are drawn with non-cleanroom paper and need to be put into cleanroom 機台或廠房設施之工程圖樣為非潔淨室用紙, 因工作需要擺放或攜入潔淨室時, 機台或廠房設施之工程圖樣為非潔淨室用紙 因工作需要擺放或攜入潔淨室時 需經該部門主管核淮 All tools, parts must be wiped clean before being brought into cleanroom 凡欲攜入潔淨室之器材, 零配件, 凡欲攜入潔淨室之器材 零配件 器具等均需擦拭乾淨 All equipment such as tables, chairs, carts, vacuum must meet the clean spec requirement 潔淨室內所使用之工具器材, 如桌椅, 推車, 潔淨室內所使用之工具器材 如桌椅 推車 吸塵器均需合乎潔淨規範