2.4 provision?
内部审核是否按照规定
的要求开展？
Does the equipment being used for measurements match the equipment 2.5 listed in the Compliance Verification Plan?
测试设备是否满足测符合性验证计划定义的设备要求?
ESD Con trol audi
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1. ESD Control Plan/控制计划
Check Point 檢查內容
Whether drew up the valid ESD control procedure to combine according to 1.1 the request of the document control carry on is control?
Do you identify the program Technical elements that need to be verified? do 2.1 ESD coordinator know them?
是否有识别要测量哪些技术项目，ESD协调员是否清楚这些技术项目?
2.2
Do you determine the verification frequency for each Technical element ? 是否确定了每个技术项目检测的频率 ?
Audit Date: Auditor: Audited supplier:
Reference 参考
Specification 標準
Tool 工具
符合
现场查阅
符合
现场查阅
符合
现场查阅
符合
现场查阅
符合
现场查阅
Evidence 審核証據
符合 符合
现场查阅 现场查阅
Average rating:
Score 分数
Is the instrumentation identified, calibrated and adjusted at prescribed
2.6
intervals (or prior to use) against verified equipment having a known, valid relationship to recognized standards?
2.9
material ? Do the non-ESD material part have the evaluation report? 设备、仪器、工具和工装上接触静电敏感器件的部分是否由防静电材料制成？
非防静电材料部分是否有评估？
Are trained personnel with the badget or all untrained personnel or visitors
0
1
2
3
NA
0.00
0.00
ESD Con trol audi
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Check Pointone procedure or guideline to define the regular ESD audit? 是否有文件规定需定期执行ESD审核?
The internal audit whether open an exhibition according to the request of the
Whether appointed one ESD control program manager or ESD coordinator 1.4 ?Do they know well their responsibility?
是否任命了ESD控制方案经理或协调员?他们是否清楚明白其职责?
Do the ESD control program cover the required Administrative and Technical Elements. (training, compliance verification, grounding, personnel grounding, 1.5 EPA requirements, packaging systems)？ ESD控制计划是否覆盖了行政和技术两个方面的要求(培训,符合性验证,人员接 地,EPA要求,包装方法)？ 2. Measurement&Verification Plan/符合性验证计划
2.10
escorted by trained personnel when they are inside an EPA ? 是否只允许有标志证明的已培训的人员或未被培训的人员需在受训人员的带领
是否编制了有效的ESD控制程序并按照文件控制的要求进行了受控？
Whether carried on definition to the sensitive degree class of the ESD 1.2 sensitive spare part?
是否针对ESD的敏感器件的敏感度级别进行了定义？
审核及验证中发现的问题是否采取了有效的纠正和预防措施？
2.8
Are compliance verification records established and maintained? 是否建立符合性验证的记录并有人负责确认和保存？
Whether the equipment,fixture and machine touch ESDS part material is ESD
使用的仪器是否依据相关标准定期(或根据使用频率)查核,校验和调整？
The inner part examine whether the problemfor discover adopted to rectify 2.7 effectively or not is the the measure with the prevention?
The power of with the ESD management whether the definition is clear and 1.3 carried on a valid communication in the company inner part?
ESD管理的权责是否定义清楚并在公司内部进行了有效的沟通？