Applications •Total Industry •Precision Gas Blending & Analyzing •Gas Injection on Surface treatment
Industry(PVD, CVD, Reactor, etc) •Semiconductor Industry •Component Leak Detection •Research and Development •High pressure Industry •Optical Fiber •Fuel Cell •Reactor System •Gas mixing System •Laboratory
1×10-9atm·cc/sec
2~100% for max range
Model M3030A ▶
Mass Flow Controller
www.line-tech.co.kr 7
Thermal Mass Flow Meter and Controller
Mass Flow Meters
Features •Accuracy at Low Flow •Fast Response •No Leakage •Connection Compactible •High stable removeable sensor •Corrosion resistance Value •Excellent Linerity •Excellent long term Stability •Modular design •Wide pressure Range available
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LINE TECH MASS FLOW METER / CONTROLLER
MASS FLOW CONTROLLER SFECIFICATIONS
MODEL
M3030V M3030A M3050V M3050A M3100V M3100A
FULL SCALE N2 (slpm)
0~50
≤2
0~5 Vdc or 4~20mA +15~28Vdc 5~1300
0~50
≤2
0~5 Vdc +15~28Vdc 5~1300
0~50
≤2
0~5 Vdc or 4~20mA +15~28Vdc 5~1300
0~50
≤2
0~5 Vdc +15~28Vdc 30~1000
0~50
≤2
0~5 Vdc or 4~20mA +15~28Vdc 30~1000
Model M2030V ▶
Mass Flow Meter
M2030V
M2030A
10sccm ~ 30slpm
≤2 sec
±1% FS
±0.25% FS
0~5Vdc
0~5Vdc or
4~20mA
+15 ~ +28Vdc, 350mA
≦90 bar
0~50 ℃
1×10-9atm·cc/sec
2~100% for max range
Model M2030A ▶
Mass Flow Meter
8 www.line-tech.co.kr
Mass Flow Controllers
Features
•Accuracy at Low Flow •Fast Response •No Leakage •Connection Compactible •High stable removeable sensor •Corrosion resistance Value •Excellent Linerity •Excellent long term Stability •Modular design •Wide pressure Range available •Compact Flow Control System
0~50
ORDERING INFORMATION
MODEL
M3030 M3100 M2030 M2100
IN/OUT SIGNAL
V : 0~5 Vdc A : 4~20 mA
FITTING SIZE
2:1/8 inc 4:1/4 inc 6:3/8 inc
FITTING TYPE
A : A-LOCK V : VCRMALE
Thermal Mass Flow Meter and Controller
Line-Tech Mass flow Controller is used widely in the Semiconductor industry as well as many Others. Transducers are designed to be rugged, easy-to-use and economical.
Line Tech | www.line-tech.co.kr
2 www.line-tech.co.kr
1997. 3 1997. 5 1998. 1 2001. 4 2002. 2 2002. 6 2003. 3 2003. 4 2004. 10 2006. 2 2007. 10 2008. 3 2008. 7
Model M3050V ▶
Mass Flow Controller
M3050V
M3050A
25 slpm~50 slpm
≤2 sec (option : ≤1 sec)
±1% FS
±0.25% FS
0~5Vdc
0~5Vdc or
4~20mA
+15 ~ +28Vdc, 350mA
≦90 bar
0~50 ℃
0.010~30 0.010~30
25~50 25~50 30~125 30~125
ACCURACY (% FS)
≤1.0 ≤1.0 ≤1.0 ≤1.0 ≤1.0 ≤1.0
REPEATABLLITY(%)
RESPONSE TIME (sec)
±0.25
≤2
±0.25
≤2
±0.25
≤2
±0.25
≤2
±0.25
Model M2050V ▶
Mass Flow Meter
M2050V
M2050A
25 slpm ~ 50 slpm
≤2 sec
±1% FS
±0.25% FS
0~5Vdc
0~5Vdc or
4~20mA
+15 ~ +28Vdc, 350mA
≦90 bar
0~50 ℃
1×10-9atm·cc/sec
2~100% for max range
Model M3030V ▶
Mass Flow Controller
M3030V
M3030A
10sccm ~ 30slpm
≤2 sec (option : ≤1 sec)
±1% FS
±0.25% FS
0~5Vdc
0~5Vdc or
4~20mA
+15 ~ +28Vdc, 350mA
≦90 bar
0~50 ℃
OPERATING PRESSURE RANGE (psia) 5~1300 5~1300 5~1300 5~1300 30~1000 30~1000
OPERATING TEMP. (。C) 0~50 0~50 0~50 0~50 0~50 0~50
MASS FLOW METER SFECIFICATIONS
MODEL
FULL SCALE N2 (slpm)
ACCURACY (% FS) NhomakorabeaREPEATABLLITY(%)
RESPONSE TIME (sec)
IN/OUT SIGNAL (Vdc/mA)
SUPPLY VOLTAGE OPERATINGPRESSURE
(Vdc)
RANGE (psia)
OPERATING TEMP. (。C)
≤2
±0.25
≤2
IN/OUT SIGNAL (Vdc/mA) 0~5 Vdc
0~5 Vdc or 4~20mA 0~5 Vdc
0~5 Vdc or 4~20mA 0~5 Vdc
0~5 Vdc or 4~20mA
SUPPLY VOLTAGE (Vdc)
+15~28Vdc +15~28Vdc +15~28Vdc +15~28Vdc +15~28Vdc +15~28Vdc
Advantage •Mass Flow Measurement •No Temperature or Pressure Corrections
Required •Compact Flow Control System •Highly Accurate •Wide pressure range available. (95bar) •High Response. Time •High Repeatability ▼ Measurement Technigue Gas flow is divided at constantrate by a laminar folw bypass. Gas molecules traveling through the sensor Carry heat downstream creating a differential temperature between the RTDS. The difference in temperature between the RTDs is propotional to the mass flow rate.