安徽工程大学毕业论文基于Solidworks的磁悬浮导轨摘要随着微机电系统(MEMS)及纳米技术的发展，对精密工作台的位移精度和动态特性等提出越来越高的要求。

这就要求作为精密工作台的重要组成部分的导轨具有较高的位移分辨率、定位精度以及动态特性。

本论文针对传统导轨直接接触的固态导轨面之间存在着不可避免的摩擦力导致忽跳忽停的爬行现象，研究一种导向性能优异的磁悬浮导轨。

考虑到传统磁悬浮导轨采用的电磁和超导磁悬浮技术不适合用于微定位系统环境，设计采用永磁悬浮导轨。

同时，为悬浮的动导轨施加各个方向可调约束力，保证动导轨稳定运行。

对磁材料进行深入对比，选择合适的材料。

在结构设计时进行了力学平衡优化设计。

最后利用solidworks软件，将所设计的磁悬浮导轨做成三维模型。

关键词：磁悬浮导轨；永磁铁；力学平衡Research on the Structure of Maglev GuidewayBased on SolidworksAbstractWith the development of MEMS and nana technology, the demands of precision worktable on positioning precision and dynamic characteristic are even higher. This requires as an important part of precision worktable of guide rail has high displacement resolution, positioning accuracy and dynamic characteristics。

Since the inevitable friction force of solid state guide rail surface, traditional guide rail has the crawling phenomenon , that is,to jump or to stop. Thus a new magnetic suspension guide rail is studied with fine guidance acharacter. Since the technologies of traditional magnetic suspension guide rail and superconductivity magnetic suspension doesn’t fit the micro positioning system environment, the permanent maglev guide rail is designed. At the same time, each direction adjustable binding force is designed to achieve steady kinestate of the guide rail. A kind of appropriate material is chose through contrast of several magnetism materials. The optimization design is carried on mechanical balance. Three-dimensional model of maglev guideway is made by Solidworks software finally.Keywords: maglev guideway ,everlasting magnet, mechanics balance目录引言........................................................ - 1 -第1章绪论..................................................... - 2 -1.1 导轨简介 ................................................. - 2 -1.2精密工作台导轨发展和研究概况.............................. - 2 -1.3本论文研究目的与意义...................................... - 4 -第2章磁悬浮导轨总体结构设计................................... - 5 -2.1 前言 ..................................................... - 5 -2.2 磁悬浮导轨结构设计 ....................................... - 5 -2.2.1前言................................................ - 5 -2.2.2磁悬浮导轨工作原理 ................................. - 5 -2.2.3 导轨材料选择....................................... - 5 -2.3磁悬浮导轨方案选择........................................ - 7 -2.3.1各磁悬浮导轨方案介绍................................ - 7 -2.3.2 磁悬浮导轨方案选择................................. - 8 -第3章磁悬浮导轨各部件详细设计 .................................- 10 -3.1定导轨设计............................................... - 10 -3.1.1定导轨框架设计..................................... - 10 -3.1.2精度设计........................................... - 10 -3.2动导轨设计............................................... - 11 -3.2.1 动导轨结构设计.................................... - 11 -3.2.2 精度设计.......................................... - 11 -3.3 磁铁设计 ................................................ - 12 -3.3.1常用永磁材料....................................... - 12 -3.3.2各永磁材料特点..................................... - 12 -3.3.3永磁材料的选用..................................... - 14 -3.4 磁槽设计 ................................................ - 15 -3.4.1活动磁槽结构设计 .................................. - 15 -3.4.2活动磁槽料选用..................................... - 16 -3.5驱动系统选择与设计....................................... - 17 -3.5.1纳米电机简介与选择 ................................ - 17 -3.5.2柔性铰链结构设计与分析............................. - 19 -3.6载荷计算................................................. - 22 -3.6.1动导轨质量计算..................................... - 22 -3.6.2受力分析........................................... - 23 -3.6.3磁力计算........................................... - 23 -第4章磁悬浮导轨测试实验.......................................- 25 -4.1前言..................................................... - 25 -4.2 对磁悬浮导轨进行标定实验 ................................ - 25 -4.2.1导轨直线度测试..................................... - 25 -马军雷：基于Solidworks的磁浮导轨4.2.2导轨定位精度....................................... - 25 -4.3数据处理................................................. - 26 -第5章结论与展望...............................................- 27 -5.1 结论 .................................................... - 27 -5.2 展望 .................................................... - 27 -致谢............................................................- 28 -参考文献........................................................- 29 -附录A 附加图.............................................. - 30 -附录B 一篇引用的外文文献及其译文........................... - 32 -附录C主要参考文献摘要...................................... - 46 -插图清单图1-2 气浮滑块运动跟踪误差曲线 ............................................................................................... - 4 - 图2-1 动导轨受力分析 ................................................................................................................... - 5 - 图2-2 方案一................................................................................................................................... - 7 - 图2-3 方案二................................................................................................................................... - 7 - 图2-4 方案三................................................................................................................................... - 8 - 图2-5 方案四................................................................................................................................... - 8 - 图3-1 定导轨................................................................................................................................. - 10 - 图3-2 底座..................................................................................................................................... - 10 - 图3-3 动导轨................................................................................................................................. - 11 - 图3-4悬浮模块.............................................................................................................................. - 11 - 图3-5导向模块.............................................................................................................................. - 11 - 图3-6 保护模块............................................................................................................................. - 12 - 图3-7四种永磁材料的退磁曲线 .................................................................................................. - 14 - 图3-8 调节腔示意图 ..................................................................................................................... - 16 - 图3-9 磁场强度轴向分量分布 ..................................................................................................... - 16 - 图3-10 磁铁边缘效应 ................................................................................................................... - 17 - 图3-11 磁体副进给过程应满足的条件 ....................................................................................... - 17 - 图3-12 纳米电机工作原理图 ....................................................................................................... - 18 - 图3-13 HR2拨爪电机.................................................................................................................... - 18 - 图3-14 A B2放大器前面板........................................................................................................ - 19 - 图3-15 A B2盒工作原理图........................................................................................................ - 19 - 图3-16 柔性铰链结构图 ............................................................................................................... - 20 - 图3-17 单轴柔性铰链示意图 ....................................................................................................... - 21 - 图3-18 柔性铰链1 ........................................................................................................................ - 22 - 图3-19 柔性铰链2 ........................................................................................................................ - 22 - 图3-20 动导轨受力分析 ............................................................................................................... - 23 - 图3-21 两长直细条形永磁体间的参数 ....................................................................................... - 23 - 图3-22 2块平行矩形界面永磁体的横截面的参数 ..................................................................... - 24 - 图4-1 99型数显自准直仪 .......................................................................................................... - 25 - 图4-2自准直仪数值显示仪 .......................................................................................................... - 25 - 图4-3 GX-9 光栅尺.................................................................................................................... - 25 -表格清单表2-1 L Y16的化学成分 .................................................................................................................. - 6 - 表2-2 L Y16室温下的力学性能 ...................................................................................................... - 6 - 表3-1常用永磁材料参数对比 ...................................................................................................... - 13 - 表3-2 常用永磁材料性能对比 ..................................................................................................... - 14 - 表3-3 烧结NdFeB和SmCo永磁的力学性能指标.................................................................... - 15 - 表3-4间隙8mm时磁场强度分布................................................................................................ - 16 - 表3-5 316L机械性能 ................................................................................................................... - 17 -引言导轨是用来保证各运动部件的相对位置和相对运动精度以及承受载荷的部件。